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Low Thermal Resistance (0.5 K/W) Ga2O3 Schottky Rectifiers with Double-Side Packaging

Test setup
Fig. 1. (a) Photo of the test setup. Schematic of Rθ measurements under (b) bottom-side cooling and (c) junction-side cooling. (d) The forward voltage at 10 mA current as a function of temperature of the pack-aged Ga2O3 SBD.
  The low thermal conductivity of Ga2O3 has arguably been the most serious concern for Ga2O3 power and RF devices. Despite many simulation studies, there is no experimental report on the thermal resistance of a large-area, packaged Ga2O3 device. This work fills this gap by demonstrating a 15-A double-side packaged Ga2O3 Schottky barrier diode (SBD) and measuring its junction-to-case thermal resistance (RθJC) in the bottom-side- and junction-side-cooling configurations. The RθJC characterization is based on the transient dual interface method, i.e., JEDEC 51-14 standard, and the test set-up is shown in Fig. 1. Fig. 2 shows the RθJC of the junction- and bottom-cooled Ga2O3 SBD was measured to be 0.5 K/W and 1.43 K/W, respectively, with the former RθJC lower than that of similarly-rated commercial SiC SBDs. This low RθJC is attributable to the heat extraction directly from the Schottky junction instead of through the Ga2O3 chip. The RθJC lower than that of commercial SiC devices proves the viability of Ga2O3 devices for high-power applications and manifest the significance of proper packaging for their thermal management.
Test Curves of Transient Thermal Impedance
Fig. 2. Transient thermal impedance curves of the Ga2O3 SBD measured with two TIMs under the (a) junction- and (b) bottom-side cooling. The insets show the zoom-in plot of the separation point. Calcu-lated structure function with two TIMs in the (c) junction- and (d) bottom-side cooling.

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